162: Principles of MEMS
نویسنده
چکیده
MEMS is an acronym for Microelectro Mechanical Systems, it defines mechanical structures fabricated with IC processing on (most often) silicon wafers. In Europe, MEMS is labeled Microsystems and in Japan it is labeled Micromachines. The term MEMS evolved in the United States in the 1990s. Prior to that period the technology was labeled silicon micromachining . MEMS defines the technology; not specific products. This technology encompasses a collection of a variety of processes enabling three-dimensional shaping of wafers or stacks of wafers. While most of the applications use silicon wafers, many other materials have been used, including glass and quartz wafers. As a result of batch manufacturing technology (using multiple devices photolithographically defined on a wafer), the cost of the single device depends on its size; wafer processing cost is fixed for a given process. The cost difference between a 1 × 1 mm device and a 10 × 10 mm device is 100 times, as the first device would yield about 16 000 devices on a 6-in diameter wafer, and the larger device would yield only about 160 devices on the same wafer. The beginning of MEMS technology dates back to the discovery of semiconductors at Bell Laboratories in the early 1950s. Many consider their 1954 paper, announcing the discovery of piezoresistive effect in silicon and germanium, as the birth date of MEMS. A related acronym MOEMS stands for Micro Opto Electro Mechanical Systems and defines a subset of MEMS, that is, devices performing optical functions.
منابع مشابه
Effects of Radiation on MEMS
The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is li...
متن کاملGenetic Algorithm Optimization for Mems Cantilevered Piezoelectric Energy Harvesters
A design optimization based on genetic algorithms for increasing power output performance of MEMS piezoelectric cantilevered energy harvesters has been performed. By employing genetic algorithms, the piezoelectric energy scavenging system with optimized shape and lateral geometries of a unimorph cantilever beam and a proof mass is simulated to achieve a power response improvement of ~1.8× in co...
متن کاملIntegrated Microelectromechanical Gyroscopes
Microelectromechanical ~MEMS! gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscop...
متن کاملA Novel Non-driven Structural MEMS-based Gyroscope
This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results ob...
متن کامل